Semiconductor Consulting Services, Expert Witness, and Patent Litigation Support

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 (ITRS) International Technology Roadmap for Semiconductor      

2012

• Update Overview
• Process Integration Devices Structures Tables Updated 
• Lithography Tables Update

• Roadmap SpreadSheet for Flash, DRAM, MPU, Lithographic, Power, and cost
  

2011

• Executive Summary
• Process Integration Devices Structures
• Front End Processes (FEP)
• Lithography
  

2009

• Process, Litography, and Interconnect Technology Roadmap (Executive Summary)
• Process, Litography, and Interconnect Technology Roadmap (detailed)
• Emerging Research Devices Roadmap
• Front-end Processes (FEP) Roadmap
• Lithography Roadmap
• Semiconductor Technology Acronyms List

2008

• Technology Roadmap (Executive Summary Draft)
• Design (2008 Draft)
• Process Integration Devices & Structures (2008 Draft)
• Emerging Research Devices (2008 Draft)
• Front End Processes (2008 Draft)
• Lithography (2008 Draft)
• Interconnect (2008 Draft)
• Yield (2008 Draft)

2007

• Technology Roadmap (Executive Summary Rev.1)
  

2006

• Executive Summary
  
• Process Integration, Devices Structures
  
• Front End Process
  
• Interconnect
  
• Lithography
  
• Metrology
  
• Yield